Journal of vacuum science & technology an official journal of the American Vacuum Society. B Microelectronics and nanometer structures

상세정보

자료유형	연속간행물
서명/저자사항	Journal of vacuum science & technology. B, Microelectronics and nanometer structures : an official journal of the American Vacuum Society.
단체저자명	American Vacuum Society. American Institute of Physics.
권.연차 사항	2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).
발행사항	New York, N.Y.: Published for the Society by the American Institute of Physics, 1983-.
형태사항	8 v.: ill.; 29 cm.
간행빈도	Bimonthly, <Jan./Feb. 1985->
이전간행빈도	Quarterly, Jan.-Mar. 1983-
축약표제	J. vac. sci. technol., B.
부분표제	Journal of vacuum science and technology. B, Microelectronics and nanometer structures. Microelectronics and nanometer structures.
선행저록	Journal of vacuum science and technology, 0022-5355, Journal of vacuum science & technology. B, Microelectronics processing and phenomena
ISSN	1071-1023
CODEN	JVTBD9
일반주기	Title from cover.
색인/초록 수록지	Computer & control abstracts, 0036-8113, Jan.-March 1983- Electrical & electronics abstracts, 0036-8105, Jan.-March 1983- Physics abstracts. Science abstracts. Series A, 0036-8091, Jan.-March 1983- SPIN, 1983- Chemical abstracts, 0009-2258 Coal abstracts, 0309-4979 Current physics index, 0098-9819 Metals abstracts, 0026-0924 World aluminum abstracts, 0002-6697
이용가능한 다른형태자료	Issued also on microfilm.
연관저록주기	Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.
일반주제명	Vacuum technology -- Periodicals.
분류기호(DDC)	533.5
언어	영어
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