| LDR | | 02988casuu2200541 a 4500 |
| 001 | | 000000352190 |
| 005 | | 20111222151616 |
| 008 | | 000118c19839999nyubr1p 0 a0eng d |
| 010 | |
▼a 83642371 //r942
▼z sn 82003446 |
| 022 | 0 |
▼a 1071-1023
▼y 0734-211X |
| 030 | |
▼a JVTBD9 |
| 032 | |
▼a 718090
▼b USPS |
| 040 | |
▼a 241008
▼c 241008
▼d 224010
▼d SMUL123 |
| 042 | |
▼a lc
▼a nsdp |
| 050 | 00 |
▼a TJ940
▼b .J669 |
| 082 | 0 |
▼a 621.5/5/05
▼2 20 |
| 090 | |
▼a 533.5
▼b J86aaB |
| 210 | 0 |
▼a J. vac. sci. technol., B. |
| 245 | 00 |
▼a Journal of vacuum science & technology.
▼n B,
▼p Microelectronics and nanometer structures :
▼b an official journal of the American Vacuum Society. |
| 246 | 10 |
▼a Journal of vacuum science and technology.
▼n B,
▼p Microelectronics and nanometer structures. |
| 246 | 10 |
▼a Microelectronics and nanometer structures. |
| 260 | 0 |
▼a New York, N.Y.:
▼b Published for the Society by the American Institute of Physics,
▼c 1983-. |
| 265 | |
▼a AIP Subscription Fulfillment Division, 500 Sunnyside Blvd., Woodbury, NY 11797 |
| 300 | |
▼a 8 v.:
▼b ill.;
▼c 29 cm. |
| 310 | |
▼a Bimonthly,
▼b <Jan./Feb. 1985-> |
| 321 | |
▼a Quarterly,
▼b Jan.-Mar. 1983- |
| 362 | 0 |
▼a 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990). |
| 500 | |
▼a Title from cover. |
| 510 | 1 |
▼a Computer & control abstracts,
▼x 0036-8113,
▼b Jan.-March 1983- |
| 510 | 1 |
▼a Electrical & electronics abstracts,
▼x 0036-8105,
▼b Jan.-March 1983- |
| 510 | 1 |
▼a Physics abstracts. Science abstracts. Series A,
▼x 0036-8091,
▼b Jan.-March 1983- |
| 510 | 1 |
▼a SPIN,
▼b 1983- |
| 510 | 2 |
▼a Chemical abstracts,
▼x 0009-2258 |
| 510 | 2 |
▼a Coal abstracts,
▼x 0309-4979 |
| 510 | 2 |
▼a Current physics index,
▼x 0098-9819 |
| 510 | 2 |
▼a Metals abstracts,
▼x 0026-0924 |
| 510 | 2 |
▼a World aluminum abstracts,
▼x 0002-6697 |
| 530 | |
▼a Issued also on microfilm. |
| 580 | |
▼a Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately. |
| 650 | 0 |
▼a Vacuum technology
▼x Periodicals. |
| 710 | 20 |
▼a American Vacuum Society. |
| 710 | 20 |
▼a American Institute of Physics. |
| 780 | 01 |
▼t Journal of vacuum science and technology,
▼x 0022-5355,
▼w (DLC) 68053979,
▼w (OCoLC)1754855 |
| 780 | 00 |
▼t Journal of vacuum science & technology. B, Microelectronics processing and phenomena |
| 787 | 1 |
▼a International Symposium on Electron, Ion, and Photon Beams.
▼t Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams,
▼x 1063-9586,
▼w (DLC) 92657341,
▼w (OCoLC)26149287 |
| 787 | 1 |
▼a Molecular Beam Epitaxy Workshop.
▼t Proceedings of the ... Molecular Beam Epitaxy Workshop,
▼x 1069-3351,
▼w (DLC) 94658569,
▼w (OCoLC)27992608 |
| 856 | 41 |
▼u http://avspublications.org/jvstb/ |