Dielectric films for advanced microelectronics [electronic resource]

상세정보

자료유형	e-Book
서명/저자사항	Dielectric films for advanced microelectronics [electronic resource] / edited by Mikhail Baklanov, Martin Green, and Karen Maex.
개인저자	Baklanov, Mikhail.  Green, Martin.  Maex, Karen.
단체저자명	John Wiley ＆ Sons, Inc.
발행사항	New York. Hoboken, N.J.: John Wiley, 2007.
형태사항	1 online resource(xxii, 486 p.).
총서사항	Wiley series in materials for electronic and optoelectronic applications
ISBN	9780470017944 (electronic bk.) 9780470065419
서지주기	Includes bibliographical references and index.
요약	The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.
복제주기	Electronic reproduction Somerset, New Jersey: Wiley InterScience, 2004. Available via World Wide Web
일반주제명	Dielectric films. Microelectronics --Materials.
분류기호(DDC)	621.381
언어	영어
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