Integrated circuit fabrication [electronic resource]

상세정보

자료유형	단행본
서명/저자사항	Integrated circuit fabrication [electronic resource] / Kumar Shubham, Ankaj Gupta.
개인저자	Shubham, Kumar, author. Gupta, Ankaj, author.
발행사항	Abingdon, Oxon ; Boca Raton: CRC Press, 2021.
형태사항	1 online resource (xvi, 336 pages) : illustrations (black and white)
ISBN	1000396444 9781000396409 1000396401 9781003178583 1003178588 9781000396447
기타표준부호	10.1201/9781003178583doi
일반주기	1. Introduction to Silicon Wafer Processing 2. Epitaxy 3. Oxidation 4. Lithography 5. Etching 6. Diffusion 7. Ion Implantation 8. Film Deposition: Dielectric, Polysilicon and Metallization 9. Packaging 10. VLSI Process Integration.
서지주기	Includes bibliographical references and index.
요약	This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length course on integrated circuit fabrication. This text can also serve as a reference for practicing engineer and scientist in the semiconductor industry. IC Fabrication are ever demanding of technology in rapidly growing industry growth opportunities are numerous. A recent survey shows that integrated circuit currently outnumber humans in UK, USA, India and China. The spectacular advances in the development and application of integrated circuit technology have led to the emergence of microelectronic process engineering as an independent discipline. Integrated circuit fabrication text books typically divide the fabrication sequence into a number of unit processes that are repeated to form the integrated circuit. The effect is to give the book an analysis flavor: a number of loosely related topics each with its own background material. Note: T & F does not sell or distribute the Hardback in India, Pakistan, Nepal, Bhutan, Bangladesh and Sri Lanka.
일반주제명	Integrated circuits --Design and construction. Circuits intégrés --Conception et construction. TECHNOLOGY --Electronics --Circuits --Integrated. Integrated circuits --Design and construction
분류기호(DDC)	624.3815
언어	영어
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