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자료유형
- Academic Journals (4)
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- Academic Journals (4)
- Conference Materials (4)
- Trade Publications (2)
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- lithography (4)
- components, circuits, devices and systems (2)
- engineered materials, dielectrics and plasmas (2)
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- lithography (4)
- components, circuits, devices and systems (2)
- engineered materials, dielectrics and plasmas (2)
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간행물
- microlithography world (5)
- 13th annual ieee/semi advanced semiconductor manufacturing conference. advancing the science & technology of semiconductor manufacturing. asmc 2002 (cat. no.02ch37259) (1)
- 13th annual ieee/semi advanced semiconductor manufacturing conference. advancing the science and technology of semiconductor manufacturing. asmc 2002 (cat. no.02ch37259), advanced semiconductor manufacturing 2002 ieee/semi conference and workshop, advanced semiconductor manufacturing (1)
간행물

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- microlithography world (5)
- 13th annual ieee/semi advanced semiconductor manufacturing conference. advancing the science & technology of semiconductor manufacturing. asmc 2002 (cat. no.02ch37259) (1)
- 13th annual ieee/semi advanced semiconductor manufacturing conference. advancing the science and technology of semiconductor manufacturing. asmc 2002 (cat. no.02ch37259), advanced semiconductor manufacturing 2002 ieee/semi conference and workshop, advanced semiconductor manufacturing (1)
- 2007 ieee/semi advanced semiconductor manufacturing conference, advanced semiconductor manufacturing conference, 2007. asmc 2007. ieee/semi (1)
- 2009 ieee/semi advanced semiconductor manufacturing conference (1)
- journal of medical education (1)
- semiconductor international (1)
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출판사
- ieee (4)
- pennwell publ co (3)
- clarion events, inc (2)
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- ieee (4)
- pennwell publ co (3)
- clarion events, inc (2)
- lippincott williams & wilkins (1)
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- 2007 (1)
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- Complementary Index (3)
- Science Citation Index Expanded (3)
- Academic Search Complete (2)
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- Complementary Index (3)
- Science Citation Index Expanded (3)
- Academic Search Complete (2)
- arXiv (2)
- IEEE Xplore Digital Library (2)
- Supplemental Index (1)
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