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Tungsten Interconnect Resistance Reduction Enabling Energy Efficient and High Performance Applications for 2nm Node and Beyond

회의자료

issue: 2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023
Author: Thareja, Gaurav
Pal, Ashish
Ma, Quan
Ching, Chi
Patel, Sahil
Gao, Xingyao
Dag, Sefa
Qi, Zhimin
Zhang, Aixi
Yue, Shiyu
Lei, Wei
Xu, Yi
Lei, Yu
Jiang, Hao
You, Shi
Zheng, Wenkai
Hung, Raymond
Costrini, Gregory
Zhu, Qing
Tran, Randy
Gupta, Rohit
Reddy, Vinod
Vyas, Pratik B.
Hassan, Sajjad
Cai, Man Ping
Shen, Gang
Chen, Zhebo
Hou, Wenting
Lei, Jianxin
Wang, Rongjun
Shen, Walters
Deshpande, Sameer
Huey, Sidney
Tang, Jianshe
Naik, Mehul
Kesapragada, Sree
Ayyagari-Sangamali, Buvna
Bazizi, El Mehdi
Tang, Xianmin
DB Label: Database : IEEE Xplore Digital Library

원문보기: Full Text (IEEE)

Plasma Modeling Framework on Dielectric Surfaces in Hybrid Bonding Technology

회의자료

issue: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) Electronics Packaging Technology Conference (EPTC), 2023 IEEE 25th. :211-215 Dec, 2023
Author: Dag, Sefa
Jiang, Liu
Hung, Raymond
Lianto, Prayudi
An, Jinho
See, Gilbert
Bazizi, El Mehdi
DB Label: Database : IEEE Xplore Digital Library

원문보기: Full Text (IEEE)

MOL Local Interconnect Innovation: Materials, Process & Systems Co-optimization for 3nm Node and Beyond

회의자료

issue: 2022 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2022 International. :12.6.1-12.6.4 Dec, 2022
Author: Pal, Ashish
Thareja, Gaurav
Dag, Sefa
Costrini, Gregory
Reddy, Vinod
Xu, Yi
Lei, Yu
Zhang, Aixi
Shen, Gang
Jansen, Alexander
Chen, Zhebo
Gage, Max
Tang, Jianshe
Yang, Yen-Chu
Deshpande, Sameer
Huey, Sidney
Hung, Raymond
Jiang, Hao
Cai, Man-Ping
Abramovitz, Yaniv
Engel, Lior
Naik, Mehul
Wang, Rongjun
Kesapragada, Sree
Ayyagari-Sangamalli, Buvna
Tang, Xianmin
Bazizi, El Mehdi
DB Label: Database : IEEE Xplore Digital Library

원문보기: Full Text (IEEE)

Ultra-low (1.2×10−9 Ωcm2) p-Si0.55Ge0.45 contact resistivity (ρc) using nanosecond laser anneal for 7nm nodes and beyond

회의자료

issue: 2017 17th International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2017 17th International Workshop on. :23-26 Jun, 2017
Author: Chang, Chih-Yang
Khaja, Fareen Adeni
Hollar, Kelly E
Rao, K. V.
Lazik, Christopher
Jin, Miao
Zhou, Hongwen
Hung, Raymond
Huang, Yi-Chiau
Chung, Hua
Mayur, Abhilash
Kim, Namsung
DB Label: Database : IEEE Xplore Digital Library

원문보기: Full Text (IEEE)

Extreme Contact Scaling with Advanced Metallization of Cobalt

회의자료

issue: 2018 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2018 IEEE International. :30-32 Jun, 2018
Author: Hung, Raymond
Park, Jin Hee
Ha, Tae Hong
Lee, Mark
Hou, Wenting
Lei, Jianxin
Bakke, Jonathan R.
Sharma, Shashank
Sharma, Karthik Raman
Kim, Nam Sung
Yeh, Ellie
Wachs, Amir
DB Label: Database : IEEE Xplore Digital Library

원문보기: Full Text (IEEE)

NMOS contact engineering for CMOS scaling

회의자료

issue: 2015 15th International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2015 15th International Workshop on. :44-49 Jun, 2015
Author: Rao, K.V.
Ni, Chi-Nung
Khaja, Fareen Adeni
Li, Xuebin
Sharma, Shashank
Hung, Raymond
Chudzik, Michael
Wood, Bingxi
Shim, Kyu-Ha
Henry, Todd
Variam, Naushad
DB Label: Database : IEEE Xplore Digital Library

원문보기: Full Text (IEEE)

Selective Etching of Native Silicon Oxide in Preference to Silicon Oxide and Silicon

회의자료

issue: 2019 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) VLSI Technology, Systems and Application (VLSI-TSA), 2019 International Symposium on. :1-2 Apr, 2019
Author: Ahles, Christopher
Choi, Jong
Hung, Raymond
Kim, Namsung
Nemani, Srinivas
Kummel, Andrew
DB Label: Database : IEEE Xplore Digital Library

원문보기: Full Text (IEEE)

The effect of interfacial oxide and high-κ thickness on NMOS Vth shift from plasma-induced damage

회의자료

issue: 2014 Silicon Nanoelectronics Workshop (SNW) Silicon Nanoelectronics Workshop (SNW), 2014 IEEE. :1-2 Jun, 2014
Author: Chang, Chih-Yang
Zhou, Jie
Ni, Chi-Nung
Chan, Osbert
Sun, Shiyu
Suen, Wesley
Mings, Sherry
Bevan, Malcolm
Liu, Patricia M.
Hsieh, Peter
Chang, Chorng-Ping
Hung, Raymond
DB Label: Database : IEEE Xplore Digital Library

원문보기: Full Text (IEEE)

Threshold voltage tuning by metal gate work function modulation for 10 nm CMOS integration and beyond

회의자료

issue: Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) VLSI Technology, Systems and Application (VLSI-TSA), Proceedings of Technical Program - 2014 International Symposium on. :1-2 Apr, 2014
Author: Yoshida, Naomi
Keping Han
Peng-Fu Hsu
Beach, Matthew
Xinliang Lu
Hung, Raymond
Daxin Mao
Hao Chen
Wei Tang
Yu Lei
Jing Zhou
Noori, Atif
Miao Jin
Kun Xu
Phatak, Anup
Shiyu Sun
Hassan, Sajjad
Gandikota, Srinivas
Chorng-Ping Chang
Brand, Adam
DB Label: Database : IEEE Xplore Digital Library