전남대학교 중앙도서관

Effect of Al/sub 2/O/sub 3/ ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures

회의자료

issue: 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual. Reliability physics symposium Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International. :463-472 2003
Author: Gall, K.
Dunn, M.L.
Hulse, M.
Finch, D.
George, S.M.
DB Label: Database : IEEE Xplore Digital Library

Fabrication process for ultra high aspect ratio polysilazane-derived MEMS

회의자료

issue: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) Microelectromechanical systems - MEMS 2002 Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on. :172-175 2002
Author: Cros, T.
Li-Anne Liew
Bright, V.M.
Dunn, M.L.
Daily, J.W.
Raj, R.
DB Label: Database : IEEE Xplore Digital Library

Development of SiCN ceramic thermal actuators

회의자료

issue: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) Microelectromechanical systems - MEMS 2002 Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on. :590-593 2002
Author: Liew, L.-A.
Bright, V.M.
Dunn, M.L.
Daily, J.W.
Raj, R.
DB Label: Database : IEEE Xplore Digital Library

Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor

회의자료

issue: Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Micro electro mechanical systems Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on. :86-89 2001
Author: Li-Anne Liew
Ruiling Luo
Yiping Liu
Wenge Zhang
Linan An
Bright, V.M.
Dunn, M.L.
Daily, J.W.
Raj, R.
DB Label: Database : IEEE Xplore Digital Library

Fabrication of SiCN MEMS structures using microforged molds

회의자료

issue: Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Micro electro mechanical systems Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on. :118-121 2001
Author: Yiping Liu
Li-Anne View
Ruiling Luo
Linan An
Bright, V.M.
Dunn, M.L.
Daily, J.W.
Raj, R.
DB Label: Database : IEEE Xplore Digital Library

Prediction of fatigue crack initiation between underfill epoxy and substrate

회의자료

issue: 2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070) Electronic components and technology Electronic Components & Technology Conference, 2000. 2000 Proceedings. 50th. :646-649 2000
Author: Wu, D.
Su, B.
Lee, Y.C.
Dunn, M.L.
DB Label: Database : IEEE Xplore Digital Library

Characterization of silicon/glass anodic bond initiation toughness

회의자료

issue: Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Micro electro mechanical systems Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on. :241-246 2000
Author: Labossiere, P.E.W.
Dunn, M.L.
Cunningham, S.J.
DB Label: Database : IEEE Xplore Digital Library

Development of injectable polymer-derived ceramics for high temperature MEMS

회의자료

issue: Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Micro electro mechanical systems Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on. :619-623 2000
Author: Linan An
Wenge Zhang
Bright, V.M.
Dunn, M.L.
Raj, R.
DB Label: Database : IEEE Xplore Digital Library

Mechanical behavior of structures for microelectromechanical systems

회의자료

issue: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) Solid-state sensors and actuators Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on. 1:611-614 vol.1 1997
Author: Wan Suwito
Dunn, M.L.
Cunningham, S.J.
DB Label: Database : IEEE Xplore Digital Library

Deformation of blanketed and patterned bilayer thin-film microstructures during post-release and cyclic thermal loading

학술저널

issue: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 12(6):788-796 Dec, 2003
Author: Yanhang Zhang
Dunn, M.L.
DB Label: Database : IEEE Xplore Digital Library

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