Database needs for modeling and simulation of plasma processing [electronic resource]

상세정보

자료유형	단행본
서명/저자사항	Database needs for modeling and simulation of plasma processing [electronic resource] / Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
단체저자명	National Research Council (U.S.). Panel on Database Needs in Plasma Processing. NetLibrary, Inc.
발행사항	Washington, D.C.: National Academy Press, 1996.
형태사항	1 online resource (64 p.) ; 28 cm.
총서사항	The compass series
ISBN	0585084548 (electronic bk.)
서지주기	Includes bibliographical references.
복제주기	Electronic reproduction. Boulder, Colo. : NetLibrary, 2000. Available via the World Wide Web. Available in multiple electronic file formats. Access may be limited to NetLibrary affiliated libraries.
일반주제명	Semiconductors --Design and construction --Congresses. Plasma engineering --Databases --Congresses. Plasma engineering --Computer simulation --Congresses. Semiconducteurs --Conception et construction --Congre?s. Plasmas, Technique des --Bases de donne?es --Congre?s. Plasmas, Technique des --Simulation par ordinateur --Congre?s.
분류기호(DDC)	621.044
언어	영어
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